Applicable to the construction of new production lines for mono-crystalline HJT solar cell manufacturers.

Inline equipment, which can be integrated with one or two boat-boat interface PECVD equipment and realize the transportation of graphite boat and wafers load & unload automatically. This equipment can be applied in the process before and after PECVD process, which can load the wafers from the cassette to the graphite boat and transport the fulfilled boat to the PECVD equipment or transport the processed boat to this equipment and unload the wafers from the graphite boat to the cassette automatically.

Integrated wafer loading& unloading, unloading the wafers from the quartz boat to the cassette or loading the wafers from the cassette to the quartz boat. Available for double back-to-back wafers in one slot which realize single side diffusion or available for single wafer in a slot for double-side diffusion. With continuous wafer loading&unloading can guarantee the continuous production . Or be used only for wafer loading or unloading is also available.

Replace manual transportation of cassettes,all information can be intelligent interaction and resources are controlled intelligently,which realize automatic production of entire production line and intelligent management of the whole plant.

The printed front &rear electrodes are fired and fused into the PN junction layer to form an ohmic contact through firing process,which allows the electrical energy collected by the fingers to flow out through the busbars.

By adjusting the Fermi energy level of the cell, controlling the total amount and valence state of H,improving the efficiency of H passivation and defect repair, to reduce the LID effect of P-type cells and improve the conversion efficiency of N-type cells.

The silver paste is printed to the surface of the cell by pressure, and becomes the positive and negative electrodes of the solar cell after drying and firing.

Al & Ag paste are printed on the surface of the wafer by screen printing technology,which becomes the positive & negative electrodes after drying and firing.

Equipment Application: Heavy doping is formed on the surface of the borosilicate glass (BSG) by SE laser doing equipment, which is used to manufacture selective emitter (SE) solar cells.

In-line physical coating equipment for Transparent Conductive Oxide (TCO) coating on wafer,glass plate or flexible substrate.

Intrinsic film deposition & a-si film doping.