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Wet Chemical Equipment Series
Horizontal Furnaces Series
Inline Equipment Series
Laser Equipment Series
Metallization Equipment Series
Smart Manufacturing Equipment Series
Production Line Solution
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HJT Inline PECVD
Intrinsic film deposition & a-si film doping.
Horizontal LPCVD
Deposition of tunnel oxide layer, i-Poly and D-poly for TOPCon solar cells.
Horizontal PECVD (Poly-Si)
Deposition of tunnel oxide layer, i-Poly and D-poly for TOPCon solar cells.
Horizontal PECVD (Two-In-One)
AlOx+SiN deposition.
Horizontal PECVD
Depositionof SiN, SiON ,etc.
Horizontal PEALD (A&P)
AlO+SiN Thin-film Deposition.
Horizontal Low Pressure Phosphorus Diffusion Equipment
Low pressure phosphorus diffusion & doping.
Horizontal Low Pressure Boron Diffusion Equipment
Low pressure, high temperature boron diffusion & doping.
Horizontal Low Pressure Oxidation/Annealing Equipment
Low Pressure oxidation, annealing.
HJT Texturing Equipment
Used for texturing and cleaning of high efficiency Heterojunction solar cells.
Batch-type Alkaline Polishing Equipment
This equipment is used for polishing, etching and cleaning treatment of diffused wafers and also compatible for texturing and cleaning treatment of bifacial solar cells.
Batch-type RCA Cleaning Equipment
Used for wrap around removal & cleaning of the diffused silicon wafers.
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