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全自动石英舟装卸片机

设备名称 Equipment Name

全自动石英舟装卸片机  Automatic Wafer Handling System for DOA Equipment


设备型号 Equipment Model

SYZ-VI / SYZ-VI-B


设备用途 Equipment Usage

集装片和卸片一体,可从石英舟中把扩散后的硅片卸到片篮中,也可从片篮中将制绒后的硅片装入石英舟中。可在⼀个石英舟插槽中插⼊两片,实现单面扩散片工艺,也可在⼀个石英舟插槽中插入一片,实现双面扩散片工艺。采用装片与卸片可连续衔接⽅式,实现连续生产;也可单独装片或单独卸片。
Integrated wafer loading& unloading, unloading the wafers from the quartz boat to the cassette or loading the wafers from the cassette to the quartz boat. Available for double back-to-back wafers in one slot which realize single side diffusion or available for single wafer in a slot for double-side diffusion. With continuous wafer loading&unloading can guarantee the continuous production . Or be used only for wafer loading or unloading is also available.

 

技术特点  Features

1、采用进口六轴机械手装卸片,确保硅片取放高可靠性。
With imported six-axis lift to load/unload and ensures high reliability of picking and placing of wafers.

2、HMI采用(IPC)工业计算机运行上位软件,通过网络通讯实现高速数据交互。
With IPC based running master computer software in HMI, high speed data interaction can be realized by network communication.

3、采用精密检测元器件检测石英舟动态位置实现纠偏定位。
With precise detection components to dectect the dynamic position of the quartz boat to rectifying the positioning.  

4、卸片前设有冷却系统,可防止因高温带来对硅片和设备的不良影响。
With cooling system before the unloading process, which can avoid any harmful effect on the wafers and equipment caused by high temperature.

5、顶齿、吸盘重要零部件采用特殊加工工艺,极大降低顶齿印、吸盘印。
The comb,gripper adopt special processing technology which greatly reduce the marks on wafers. 

6、装卸花篮可做立式或卧式,客户可根据需求灵活选择。
Cassette can be vertical or horizontal, customer can choose flexibly according to their needs. 

7、可选配MES功能;可选配方阻检测模组;可选配AGV。

MES function, sheet resistance detection and AGV, optional.

 

设备参数  Parameters