管式PECVD设备

设备名称 Equipment Name

管式PECVD设备  Horizontal PECVD

设备型号 Equipment Model

PD-520/PD-520L/PD-520MAX

设备用途 Equipment Application

SiN、SiON等薄膜沉积。
Depositionof SiN, SiON ,etc.

技术特点  Features

1、可靠电极接触，有效减少粉尘、降低高频报警频次。

Reliable electrode contact, effectively reduce dust as well as the frequency of high frequency alarms.

2、简单可靠自动上下舟机构，提升设备维护空间与便利。
Simple and reliable automatic boat loading/unloading unit improves themaintenance space and convenience of the equipment.

3、运动部件单面安装维护，减少设备背靠背布局占地面积的同时不影响设备维护难度。
Single-sided installation and maintenance of moving parts,reducing the footprint of the back-to-back equipment without affecting the maintenance of the equipment.

4、高速平稳整体模组推舟机构。
High-speed and stable integral module boat pushing mechanism.

5、辅助加热专利技术。
Auxiliary heating patent technology.

6、快速镀膜工艺技术。
Rapid coating technology.

7、自主知识产权MES软件、中央计算机集中控制系统。
MES software & CCC system with independent intellectual property rights.

设备参数  Parameters