设备名称 Equipment Name
光注入退火炉 Light Injection Annealing Furnace
设备型号 Equipment Model
SC-LED05L/RA
设备用途 Equipment Application
调节电池片费米能级变化,控制H总量及价态,提高H钝化与缺陷修复效率,达到降低P型电池衰减效应,提高N型电池转换效率的效果。
By adjusting the Fermi energy level of the cell, controlling the total amount and valence state of H,improving the efficiency of H passivation and defect repair, to reduce the LID effect of P-type cells and improve the conversion efficiency of N-type cells.
工艺流程 Process Flow
预热→光注入→冷却
Pre-heating →Light Injection →Cooling
技术特点 Features
1、双轨产线,机架电气完全独立,互不干扰。
Dual-track production line, the rack and electrical parts completely independent without interfering operations of each other.
2、大产能:匹配丝印工序产能,CT≤0.80秒,基于硅片尺寸M10(18X±0.5mm*18X±0.5mm)。
High throughput: match with the throughput of screen printing process, CT≤0.80s,based on silicon wafer size M10 (18X±0.5mm*18X±0.5mm).
设备参数 Parameters
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