Horizontal PECVD (Two-In-One)
Horizontal PECVD (Two-In-One)
AlOx+SiN deposition.
Equipment Name:
Horizontal PECVD (Two-In-One)
Equipment Model:
PD-520/PD-520L/PD-520MAX
Equipment Application:
AlOx+SiN deposition.
Features:
1、The AIOx & SiN layers can be coated in the same furnace tube which helps in reducing the process steps,improving the yield and lowering the breakage rate effectively.
2、Optimal throughout solution: two-in-one configuration.
Parameters:
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