PRODUCTS > Crystalline Solar Cell Process Equipment > Horizontal PECVD (AlOx )

Horizontal PECVD (AlOx )

Equipment Name

Horizontal PECVD (AlOx ) 

Equipment Model


Equipment Application

Deposit AlOx passivition dielectric film on the rear side of wafers using N2O and TMA gas to increase voltage and current of the solar cell and then deposit SixNy protective film on the surface of the AlOx film.

Process Flow

Graphite boat & wafers ready→ Nitrogen inlet→ graphite boat load in→ vacuumize, pressure test → deposit AlOx film→ vacuumize, pressure test→ tube cleaning and Nitrogen inlet→ graphite boat unload.


· AlOx, SiOxNy and SiNx complex layers.  

· Compatible with SiNx and SiOxNy PERC process. 

· Double water-cooled sealing technology .

· Patented internal heating technology.

· High-speed integral module boat pushing mechanism.

· Graphite boat contact-free with quartz tube.

· MES software with independent intellectual property right.

· Independently developed CCC system.

· Fast coating technology.

· Alarm protection for over-heating, thermocouple -break and boat collision.