Mainly used for generating highest quality anti-reflective coatings in the production of crystal silicon solar cells, and for deposition of passivation film on the rear side of solar cells.
Graphite boat & wafers ready→ Nitrogen inlet→ Graphite boat load in→ Vacuumize, pressure test →Ammonia pre-clean and check→ Vacuumize the tube, leak-checking, constant temperature→ Pre-coating →Coating→ Vacuumize, pressure test→ Tube cleaning and Nitrogen inlet→ Graphite boat unload.
· Compatible with SiOxNy PERC process.
· Double cooling water flanges sealing technology.
· Patented internal heating technology.
· High-speed integral module boat pushing mechanism.
· Graphite boat contact-free with quartz tube.
· MES software with independent intellectual property right.
· Independently developed CCC system.
· Fast coating technology.
· Alarm protection for over-heating, thermocouple -break and boat collision.