Automatic Wafer Handling System for DOA Equipment
SYZ-V / SYZ-VI
Integrated wafer loading& unloading, unloading the wafers from the quartz boat to the cassette or loading the wafers from the cassette to the quartz boat. Available for double back-to-back wafers in one slot which realize single side diffusion or available for single wafer in a slot for double-side diffusion. With continuous wafer loading&unloading can guarantee the continuous production . Or be used only for wafer loading or unloading is also available.
· With imported six-axis lift to load/unload and ensures high reliability of picking and placing of wafers.
· With IPC to running master computer software in HMI, high speed data interaction can be realized by network communication.
· With CCD industrial camera to detect dynamic location of quartz boat , which can realize deviation rectification and positioning.
· With cooling system before the unloading process, which can avoid any harmful effect on the wafers and equipment caused by high temperature.
· CCD images show the wafers condition inside the quartz boat, combine with the gripping status of each gripper can realize mis-gripping and wafer dropping detection (optional, standard equipment without this function).
· CCD images analyze the broken wafers in ceramic comb area.(optional).
· MES function, sheet resistance detection and AGV, optional.