Automatic Wafer Handling Systemfor PECVD
Inline equipment, which can beintegrated with one boat-side-out PECVD equipment and realize thetransportation of graphite boat and wafers load & unload automatically.This equipment can be applied in the process before and after PECVD process,which can load the wafers from the cassette to the graphite boat and transportthe fulfilled boat to the PECVD equipment or transport the processed boat tothis equipment and unload the wafers from the graphite boat to the cassetteautomatically.
· With modular design,which can inline integrated with one or two sets of PECVD equipment.
· With PC control,tablet computer operation,which is easy and clear for operation.
· Online micro-crack detection,film thickness detection,color inspection system and automatic dealing with NG wafers(need extra charges).
· Inline/offline configuration.
· Compatible with AGV,RFID system,MES function optional.