PRODUCTS > Automatic Equipment > Automatic Wafer Loader ZP-Ⅲ/LSP-Ⅱ

Automatic Wafer Loader ZP-Ⅲ/LSP-Ⅱ

Equipment Name:  Automatic Wafer Loader

Equipment Model: ZP-III/LSP-II

Equipment Application: 

ZP-III:Load the stacked wafers into cassette and transport the cassette to next process step automatically.

LSP-II:Load the wafers in the cassette to the 5-lane inline cleaning equipment automatically.

Features

ZP-III

·With PLC control and the loading process is completed automatically; Touch-screen operation, which is easy and clear.

·With double workstations improve the working efficiency.

·With overlapping detection, loading station with/ without wafer detection, cassette positioning and monitoring fuction etc.

·Compatible with AGV, RFID, MES function.


LSP-II

·With PLC control and the loading process is completed automatically; Touch-screen operation, which is easy and clear.

·Single workstation loading and buffer unit, the operation will not be interrupted during the cassettes swap which guarantees the working efficiency.

·Automatic circulation of cassette's baseplate. (Optional, need extra charges)

·Compatible with AGV, RFID, MES function.

 


Parameters


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